With this paper, The brand new lapping slurry and sprucing slurry are released. And also the deliquescence degree of CLBO is fallen to cheapest. A completely new Doing work engineering is likewise adopted. After rough polishing, the focus of extremely-precision sprucing slurry is amplified thoroughly. So does the extremely-precision sprucing pace, along with the wiping speed is faster compared to the deliquescence speed. The CLBO crystal area roughness can reach 1nm and continue to keep the floor good quality perfectly. Obtain as a result of your institution
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For example, the current concave OC could get replaced by a aircraft mirror which could mitigate the power density over the floor of M1 as well as the diamond. Furthermore, applying significant harm threshold coatings for M1 and diamond would also Increase the output power with none damages. Then, the NIR laser in the 2nd Stokes wavelength can be large more than enough, and also its good beam top quality, to deliver the ultimate DUV laser at 193 nm having a substantial ordinary electricity.
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On the other aspect, the facility scaling on the NIR laser is yet another factor to increase the regular ability on the 193-nm DUV laser. Mainly because of the insufficient the significant-energy amplification Resolution of your NIR laser (for instance at 1553 nm), nonlinear frequency processes for example optical parameter oscillation (OPO) can be placed on build a wavelength converter by shifting the wavelength from 1 μm to the desired wavelength in addition to obtaining relative larger electricity [21]. Not long ago, a diamond Raman laser confirmed its means in achieving a high power and a high conversion performance with the 1st Stokes in the 1-μm laser [22,23], which means the likelihood to become used while in the 193-nm DUV laser generation because of its higher Raman gain and huge frequency shift.
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Tunable ultraviolet laser resource based upon reliable-point out dye laser technological know-how and CsLiB6O10 harmonic era
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The development with the 193-nm laser was demonstrated by phases of SFG. In order to scale the DUV laser electricity effectively, a completely new idea with the 193-nm DUV laser technology is introduced determined by the diamond Raman laser.